Dynamic compensation system for maskless lithography

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A method for dynamically registering multiple patterned layers on a substrate (3) comprises: depositing a first layer on the substrate; printing a first pattern (20) on the first layer; depositing a second layer on the first pattern; and printing a second pattern on the second layer while dynamically detecting the first pattern to align the second pattern with the first pattern. (Read Full Article)

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PatFT, AppFT (May 6 2008) Patents

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