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High speed interferometric ellipsometer
Chien-Chung Tsai, Hsiang-Chun Wei, Sheng-Lung Huang, Chu-En Lin, Chih-Jen Yu, Chien Chou. A novel high speed interferometric ellipsometer (HSIE) is proposed and demonstrated. It is based on a novel differential-phase decoder which is able to convert the phase modulation into amplitude modulation in a polarized heterodyne interferometer. Not only high detection sensitivity but also fast ... [Opt. Express 16, 7778-7788 (2008)]