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Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments
SPIE Digital Library (Apr 30 2008) Microscopy Explore Article
David L. Dickensheets We explore the use of deformable membrane mirrors for primary focus control and spherical aberration correction in confocal microscopes and optical coherence tomography instruments that are miniaturized for in-situ imaging. Membrane requirements to achieve specified system performance are explored f ... [J. Micro/Nanolith. MEMS MOEMS 7, 021008 (2008)] published Wed Apr 30, 2008. (Read Full Article)






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